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Dr. Chang Zhou Product Director and Deputy Director of Technology, Shanghai Micro Electronics Equipment Co.,Ltd.(SMEE) |
| 个人简介 / Biography | |
| Doctor Zhou (Chang), graduated from Huazhong University of Science and Technology in 2003, is a professor-level senior engineer, a leader of national key-areas of the innovation team, and also an expert in national high-level personnel of special support program. He is now working for SMEE as product director and deputy technical director, taking charge of FPD precision equipment planning and R&D.
With more than 10 years of high level equipment developing experience in semiconductor and display industry field, Doctor Zhou is proficient in complex system modelling, optical engineering, precision mechanics, automatic control and measurement, also in large project management and guiding product into market. His team developed the first domestic projection lithography tool for MP line, which achieved the sales of dozens of units and also entered the oversea market. |
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| 摘要 / Abstract | |
| FPD high precision equipment in Array/OLED/Cell/CF process are mainly provided by foreign suppliers until now. Furthermore, a certain of equipment are optimized by equipment departments of some foreign Fabs, and the technologies are strictly restricted to importation into China, which may limit development of local FPD industry. However, some local equipment suppliers grew up in the past decades during the industry modernization. Some high precision FPD equipment are made out and sold for mass production or R&D due to the accumulated strong skills. These skills are able to generate more precise equipment according to the local requirement, which may help the local Fabs to achieve technical progress and yield improvement. |
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